| DaftarIsitemplate |
| Call Number |
| SEM-347 |
| Title |
| Neural network predictive R2R control to CMP process, 9-13 |
| Author |
| Liang Wang, Jingtao Hu; |
| Publisher |
| Proceedings 2011 4th IEEE International Conference on computer science and information technology Juni 10-12, 2011 Chengdu, China (ICCSIT 2011) |
| Subject |
| Location |